Semiconductors , Materials and Energy Research Center (MERC)
Nanoporous silicon powder was produced via efficient magnesiothermic reduction. In this work, the thermal effect and reduction process time were investigated on the porous silicon structure. The nanoporous silicon powders were characterized by X-ray diffraction analysis and field emission scanning electron microscopy. The results demonstrate that porous structure was changed to homogeneous and uniform porous structure when the heating ramp rate was controlled at 5 0C/min. The average pore size of uniform porous silicon was reported 195.8 nm.