Optimization of Chemical Texturing of Silicon Wafers Using Different Concentrations of Sodium Hydroxide in Etching Solution


1 Semiconductor, Merc

2 Semiconductors, Materials and Energy Research Center (MERC)

3 Semiconductor, MERC


In this paper, the morphology of chemically etched silicon with various concentration  is reported. The surface of Silicon (100) has pyramidal structures which can be used for anti-reflection applications in solar cells. Pyramidal structures can capture incident sun light therefore can enhance the efficiency of silicon solar cells. The structure of silicon pyramid was studied using scanning electron microscopy (SEM) while the optical properties was investigated by reflectance spectrometer


Main Subjects

1. Hylton, J.D., Burgers, A.R., Sinke, W.C. and Energy, E.S., "Light trapping in alkaline texture etched crystalline silicon wafers" Proceedings of XVI European Photovoltaic Solar Energy Conference, (2000).
2. Price, J.B., "Anisotropic Etching of Silicon with KOH", Journal of the Electrochemical Society, Vol. 120, No. 3, (1973).
3. Lee, D.B., "Anisotropic etching of silicon", Journal of Applied physics, Vol. 40, No. 11, (1969), 4569-4574.
4. Naderi, N., Hashim, M.R., &Amran, T.S.T., "Enhanced physical properties of porous silicon for improved hydrogen gas sensing", Superlattices and Microstructures, No. 5, (2012), 626 -634.
5. Bean, K.E., "Anisotropic etching of silicon", IEEE Transactions on Electron Devices, Vol. 25, No. 10, (1978), 1185-1193.
6. Xiang, Z., Liu, C. and Lai, C., "Corrosion of Fresh Porous Silicon in Potassium Hydroxide Solution", International Journal of Electrochemical Science, Vol. 10, (2015), 3935- 3948.